Metrology & Inspection (YieldStar / HMI)

Overview

YieldStar optical metrology systems measure focus, dose, and overlay on exposed wafers, while HMI (Hermes Microvision) e-beam systems locate and analyze individual chip defects - together closing the litho control loop that keeps EUV and DUV scanners in spec. The latest YieldStar 10 extends in-line EUV metrology to sub-3nm nodes, and the HMI eP5 is ASML's highest-resolution e-beam system for defect detection and CD metrology.

The smallest of ASML's four product lines by revenue (~€1B in 2025) but a growing area of R&D investment as shrinking nodes make yield control harder

Key Specs