A16 Process Node
In Development
TSMC
Overview
TSMC's 1.6nm-class node combining gate-all-around nanosheets with Super Power Rail backside power delivery, targeting AI and HPC chips with 8–10% more speed or 15–20% less power than N2P. Volume production is now slated for 2027 after slipping from the original H2 2026 target; the follow-on A14, A12, and A13 nodes extend the roadmap to 2029 — all planned without High-NA EUV.
Volume production 2027 (slipped from H2 2026 at the April 2026 Technology Symposium)